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URL: https://sro.txst.edu/sro-facilities/sro-nrsc/sro-nrsc-tztf.html
Proper Citation: Texas State University 3-Zone Tube Furnace (RRID:SCR_028192)
Description: Custom system intended for flexible annealing or chemical vapor deposition processing at temperatures < 1000oC. Process and/or purge gases (Ar, 4%H2 in Ar, N2) are introduced via a manifold into the quartz tube at either atmospheric or sub-atmospheric pressures. The maximum sample size is 60mm (~2").
Synonyms: 3-Zone Tube Furnace
Resource Type: instrument resource
Keywords: Texas State University, instrument, annealing or chemical vapor deposition,
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