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URL: https://plasma.oxinst.com/products/dsie/plasmapro-100-estrelas
Proper Citation: Oxford: PlasmaPro 100 Estrelas Plasma Technology (RRID:SCR_020373)
Description: Platform is designed to give total flexibility for Deep Silicon Etch applications. Serves diverse set of process requirements across Micro Electro Mechanical Systems and Advanced Packaging and Nanotechnology markets.
Resource Type: instrument resource
Keywords: Oxford, Plasma Technology, Instrument, Resource equipment, Equipment, USEDit,
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