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URL: https://www.fei.com/products/efa/meridian-m-for-semiconductors/
Proper Citation: FEI: Meridian M System for Semiconductors (RRID:SCR_019897)
Description: Electrical failure analysis system for semiconductors that uses high sensitivity broadband DBX photon emission and Static Laser Stimulation techniques to pinpoint the location of electrical faults.
Resource Type: instrument resource
Keywords: FEI, EFA System, Instrument Equipment, USEDit,
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