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URL: https://raw.githubusercontent.com/SciCrunch/RRID-Instruments/refs/heads/main/PDF/SCR_019886.pdf
Proper Citation: FEI: Helios NanoLab 1200AT DualBeam for Semiconductors (RRID:SCR_019886)
Description: Wafer analysis system that can create site-specific transmission electron microscope (TEM) samples thin enough to capture a single transistor at the 10nm node, from wafers up to 300mm in diameter.
Resource Type: instrument resource
Keywords: FEI, DualBeam Microscope, Instrument Equipment, USEDit,
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