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URL: http://www.scienceexchange.com/facilities/nanofabrication-facility
Proper Citation: UConn Nanofabrication Facility (RRID:SCR_012346)
Description: THIS RESOURCE IS NO LONGER IN SERVICE. Documented on May 16, 20224. Nanofabrication Facility houses three instruments for patterning of flat surfaces and selective etching of materials. Researchers fabricate devices and structures to demonstrate novel device concepts and to characterize new materials. To carry out these functions this new facility consists of three instruments: a Tescan Electron-Beam Lithography Tool, an OAI high resolution Mask Aligner and Advanced Vacuum/Plasma Therm Reactive Ion Etcher.
Abbreviations: UConn Nanofabrication Facility
Synonyms: UConn Biotechnology - Bioservices Center Nanofabrication Facility, University of Connecticut Biotechnology - Bioservices Center Nanofabrication Facility
Resource Type: core facility, service resource, access service resource
Keywords: electron beam lithography, optical lithography, reactive ion etching
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The NIDDK Information Network (dkNET) serves the needs of basic and clinical investigators by providing seamless access to large pools of data and research resources relevant to the mission of The National Institute of Diabetes Digestive and Kidney Diseases (NIDDK). dkNET is hosted at University of California San Diego, and is supported by NIH NIDDK grant 2U24DK097771-09.
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