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URL: http://harvard.eagle-i.net/i/00000130-d6cd-1ce1-8a1b-bf0e80000000
Proper Citation: Edwards: Auto 306 e-beam Evaporator (RRID:SCR_019844)
Description: E-beam evaporator recommended for oxide and nitride materials. Designed to operate around the e-5 millibar vacuum range, EE-2 can also be used to deposit metals (non-toxic materials) if very low pressure is not a critical factor in your process. The water-cooled substrate holder can accommodate one wafer up to 3� diameter. EE-2 has a rotary-vane mechanical roughing pump and a turbo high-vacuum pump, and is a relatively low voltage (~3.8kV) electron beam evaporation deposition system with a 4-pocket, water-cooled rotating hearth.
Resource Type: instrument resource
Keywords: Edwards, Evaporator, Instrument Equipment, USEDit
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